中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2024, Vol. 24 ›› Issue (9): 090206 . doi: 10.16257/j.cnki.1681-1070.2024.0120

• 封装、组装与测试 • 上一篇    下一篇

键合参数对电镀金键合性能的影响*

王世春1,3;沈若尧1;任长友2;张欣桐1;武帅1;邓川2;王彤2;郭可升1;刘宏1;郝志峰3   

  1. 1.季华实验室,广东 佛山? 528200;2.深圳市联合蓝海应用材料科技股份有限公司,广东 深圳? 518020;3. 广东工业大学轻工化工学院,广州? 510006
  • 收稿日期:2024-04-07 出版日期:2024-09-25 发布日期:2024-09-25
  • 作者简介:王世春(2001—),男,江西赣州人,本科,主要研究方向为无氰电镀金技术与电子封装。

Influence of Bonding Parameters on the Bonding Performance of Electroplated Gold

WANG Shichun1,3, SHEN Ruoyao1, REN Changyou2, ZHANG Xintong1, WU Shuai1, DENG Chuan2, WANG Tong2, GUO Kesheng1, LIU Hong1, HAO Zhifeng3   

  1. 1. JihuaLaboratory, Foshan 528200, China; 2. Shenzhen UnitedBlueocean Applied Materials Technology Co., Ltd., Shenzhen 518020, China; 3. School of ChemicalEngineering and Light Industry, GuangdongUniversity of Technology, Guangzhou510006, China
  • Received:2024-04-07 Online:2024-09-25 Published:2024-09-25

摘要: 采用超声波键合对由无氰电镀金和含氰电镀金制备的封装材料进行金丝键合测试,研究了键合工艺参数(超声功率、超声时间、键合压力)对键合性能的影响。结果表明,采用无氰电镀金液的底材材料硬度高,金丝焊球处发生失效的现象较多,而采用含氰电镀金液的底材材料硬度低,金丝焊球处发生失效的现象较少。对于低硬度的电镀金层,其焊球直径和键合高度都较低,有助于键合金丝和电镀金界面实现更好的融合。超声时间是影响键合性能的主要因素,当超声时间增加至300 ms,金丝焊球不再出现失效,有效解决了键合性能不良的问题。

关键词: 封装技术, 电镀金液, 工艺参数, 超声波键合, 力学性能

Abstract: Ultrasonic bonding is used to carry out gold wire bonding test on materials prepared from cyanide-free gold electroplating and cyanide-containing gold electroplating for chip packaging, and the influence of bonding process parameters (ultrasonic power, ultrasonic time, bonding pressure) on the bonding performance is studied. The results show that the substrates with cyanide-free gold electroplating solution have higher hardness and more failures occur at the gold wire soldering balls, while the substrates with cyanide-containing gold electroplating solution have lower hardness and less failures occur at the gold wire soldering balls. For low hardness electroplating gold, the soldering ball diameter and bonding height are lower, which helps to achieve better fusion between the bonding gold wire and the electroplating gold interface. The ultrasonic time is the main factor affecting the bonding performance. When the ultrasonic time is increased to 300 ms, the gold wire soldering balls no longer fail, which effectively solves the problem of poor bonding performance.

Key words: packaging technology, gold electroplating solution, process parameter, ultrasonic bonding, mechanical property

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