中国电子学会电子制造与封装技术分会会刊

中国半导体行业协会封测分会会刊

无锡市集成电路学会会刊

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电子与封装

• 封装、组装与测试 •    下一篇

大尺寸低翘曲2.5D封装倒装焊工艺研究

徐士猛1,2,王志慧3,练滨浩2,陈昶昊2,李建中2,刘弈光3,栗致浩3,谢晓辰2,林鹏荣2,郭亨通2   

  1. 1. 清华大学集成电路学院,北京  100084;2. 北京微电子技术研究所,北京  100076;3. 中国航天标准化与产品保证研究院,北京  100071
  • 收稿日期:2025-11-21 修回日期:2026-01-30 出版日期:2026-02-02 发布日期:2026-02-02
  • 通讯作者: 郭亨通

Inverted Soldering Process for Large Size Low Warpage 2.5D Packaging

XU Shimeng1,2, WANG Zhihui3, LIAN Binhao2, CHEN Changhao2, LI Jianzhong2, LIU Yiguang3, LI Zhihao3, XIE Xiaochen2, LIN Pengrong2, GUO Hengtong2   

  1. 1. School of IC, Tsinghua University, Beijing 100084, China; 2. Beijing Institute of Microelectronics Technology, Beijing 100076, China; 3. China Aerospace Standardization and Product Assurance Research Institute, Beijing 100071, China
  • Received:2025-11-21 Revised:2026-01-30 Online:2026-02-02 Published:2026-02-02

摘要: 针对2.5D集成产品等新一代宇航集成电路高密度、高集成封装要求,开展基于加压回流的注塑模组倒装焊技术研究。研究结果表明,注塑模组及基板存在相似的翘曲趋势和翘曲方向转变规律。在高于Tg温度后注塑料膨胀是模组的主要翘曲来源。基板多层布线的层间和层内差异是基板局部翘曲差异的主要来源。对比无工装、压力工装、限位工装等不同工况下的加压回流焊点形态及仿真结果,无工装回流焊接存在较大的虚焊风险,压力工装、限位工装均能有效的消除焊点虚焊,但限位工装工况下焊点拥有更高的焊点高度。通过高密度集成微互连结构多场耦合本构建模与基于跨尺度子模型的有限元寿命仿真,计算得到焊点疲劳寿命为3 390次。多应力的可靠性评估表明2.5D芯粒集成倒装焊器件能够通过筛选、鉴定D3、D4分组、高温存储、温度循环、耐焊接热、HAST等可靠性考核。有效解决了注塑模组及LTCC基板回流翘曲导致的倒装焊点虚焊、桥连等问题,为航天重大工程用的2.5D集成产品研制提供封装技术支撑。

关键词: 微焊点, 尺寸效应, 界面反应, 工艺优化

Abstract: This article focuses on the high-density and high integration packaging requirements of new generation aerospace integrated circuits such as 2.5D integrated products, and conducts research on injection molding module flip chip technology based on pressure reflow. Research has shown that injection molding modules and substrates exhibit similar warpage trends and changes in warpage direction. The main source of module warping is the expansion of injected plastic after reaching temperatures above Tg. The interlayer and intralayer differences of multi-layer wiring on a substrate are the main source of local warpage differences in the substrate. Comparing the shape and simulation results of pressure reflow solder joints under different working conditions such as no fixture, gravity pressure block, and limit fixture, it is found that there is a significant risk of virtual soldering in reflow soldering without fixture. Gravity pressure block and limit fixture can effectively eliminate virtual soldering of solder joints, but under limit fixture working conditions, solder joints have a higher height. Through high-density integrated micro interconnect structure multi field coupling constitutive modeling and finite element life simulation based on cross scale sub models, the fatigue life of solder joints was calculated to be 3390 times. The reliability assessment of multi stress shows that 2.5D chip integrated flip chip devices can pass reliability assessments such as screening, identification of D3 and D4 grouping, high-temperature storage, temperature cycling, solder heat resistance, and HAST. Effectively solved the problems of flip chip bump virtual soldering and bridging caused by reflow warping of injection molding modules and LTCC substrates, providing packaging technology support for the development of 2.5D integrated products for major aerospace projects.

Key words: micro solder joints, Size effect, Interface response, process optimization