关键词: 探针台, 晶圆, 辐照, 高低温, 测试系统

Abstract: The paper describes a portable probe station which is small and convenient. It costs little and meets the basic test requirements. Particularly, the microscopes and probe stations are separated to enable radiation tests. The probe station and chips can be well placed to facilitate better radiation alignment. The probe station can also be placed in high and low temperature oven for tri-temperature tests. The microscope can be flexibly fixed for all-round observation. The multi-probe structure supports multi-channel tests. The probe and wires are safely connected using low-leakage and EMI design which achieves the test accuracy of 0.1nA. The aluminum shielding box of good grounding performance enhances anti-noise interference ability and accuracy.

Key words: probe station, wafer, irradiation, high and low temperature, test systems