中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2022, Vol. 22 ›› Issue (6): 060101 . doi: 10.16257/j.cnki.1681-1070.2022.0605

所属专题: 碳化硅功率半导体技术

• "碳化硅功率半导体技术”专题 •    下一篇

SiC功率器件辐照效应研究进展

刘超铭1;王雅宁1;魏轶聃2;王天琦1;齐春华1;张延清1;马国亮1;刘国柱2;魏敬和2;霍明学1   

  1. 1. 哈尔滨工业大学空间环境与物质科学研究院,哈尔滨 150001; 2. 中国电子科技集团公司第五十八研究所,江苏 无锡 214072
  • 收稿日期:2021-11-25 出版日期:2022-06-23 发布日期:2022-03-25
  • 作者简介:刘超铭(1986—),男,黑龙江哈尔滨人,博士,副教授,博士生导师,主要研究方向为电子元器件辐射效应及可靠性。

Progress in the Study of Irradiation Effects of SiC Power Devices

LIU Chaoming1, WANG Yaning1, WEI Yidan2, WANG Tianqi1, QI Chunhua1, ZHANG Yanqing1, MA Guoliang1, LIU Guozhu2, WEI Jinghe2, HUO Mingxue1   

  1. 1. Space Environment SimulationResearch Infrastructure, HarbinInstitute of Technology, Harbin 150001,China; 2. China Electronics Technology Group Corporation No.58Research Institute, Wuxi 214072, China
  • Received:2021-11-25 Online:2022-06-23 Published:2022-03-25

摘要: SiC功率器件是许多航天器用电子设备的重要组成部分,是保障深空探测任务顺利进行的前提和基础。在梳理SiC功率器件发展概况的同时,针对不同SiC功率器件(SiC SBD、SiC JBS、SiC MOSFET)在空间辐射环境下的性能退化规律进行了概述,重点分析了辐射环境下SiC功率器件的损伤机理,为SiC功率器件抗辐射性能工艺的长远发展提供了参考。

关键词: SiC功率器件, 肖特基势垒二极管, 结势垒肖特基二极管, MOSFET, 空间辐射效应, 损伤机理

Abstract: SiC power device is an important part of many spacecraft electronic equipment. It is the premise and foundation to ensure the smooth progress of deep space exploration mission. While combing the development of SiC power devices, this paper summarizes the performance degradation law of different SiC power devices (SiC SBD, SiC JBS, SiC MOSFET) in space radiation environment, and focuses on the damage mechanism of SiC Power Devices in radiation environment, which provides a reference for the long-term development of radiation resistance technology of SiC power devices.

Key words: SiCpowerdevice, schottkybarrierdiode, junctionbarrierschottkydiode, MOSFET, spaceradiationeffect, damagemechanism

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