关键词: 光学检漏, 气密性, 漏率计算公式

Abstract: Optical Leak Testing (OLT) is a new technology for leak testing in recent years due to its advanced digital microelectronic holography interferometry , that could accomplished simultaneous fine and gross leak testing of traditional hermetic packages. This paper introduces the derivation process of leak rate calculation formulas of OLT, the accuracy of testing data and the pros and cons of OLT are also compared and discussed .

Key words: optical leak testing, hermeticity, leak rate calculation formulas