关键词: 集成电路, 失效分析, 协同分析, 失效定位

Abstract: With the development of integrated circuit scale and manufacturing process, it is difficult to locate the fail-ure point of failure circuits. Single analysis method may not obtain the expected result. Advanced analytical instruments and devices and multiple methods of collaborative analysis become inevitable choices for fail-ure location analysis of large-scale integrated circuits. According to the failure analysis standards and pro-cess, equipment is divided into three levels. Various failure cases found in each analysis stage show that the multi-analysis method is conducive to achieve fast and accurate positioning of large-scale integrated circuit failure points. The analysis obtained during the process provides reliable reference for further failure analy-sis.

Key words: integrated circuit, failure analysis, collaborative analysis, failure location