关键词: 水汽含量检测, 检测设备, 极限值, 陶瓷封装

Abstract: The comparison of water vapor content detection in air-sealed ceramic packaging by nine domestic testing institutions in 2023 is introduced. Water vapor content detection is an important means to feed back the packaging process of electronic components. According to the method in GJB548C—2021 "Test Methods and Procedures for Microelectronic Devices", the water vapor content value in units of 10^－6 is obtained through mass spectrometry principle. In recent years, the water vapor content detection equipment used by domestic testing institutions is in the updating iteration of new and old models. Through the comparison data, the detection difference degree of different equipment is identified when the water vapor content inside the packaging is close to the detection limit value, and the performance status of the equipment is understood, so as to improve the mutual recognition of detection data between institutions. A detailed program for detection and comparison is formulated, and the comparison results are instructive.

Key words: water vapor content detection, detection equipment, limit value, ceramic packaging