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中国电子学会电子制造与封装技术分会会刊

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• 封装、组装与测试 •    下一篇

两相浸没式冷却沸腾增强结构研究进展

武科伟1,韩雅欣1,吴佳伟1,朱玥莹1,刘强1,季兴桥3,郑德印1,2   

  1. 1. 天津大学微电子学院,天津  300072;2. 天津大学智能传感功能材料全国重点实验室,天津  300072;3.中国电子科技集团公司第二十九研究所,成都  610036
  • 收稿日期:2025-12-17 修回日期:2026-01-19 出版日期:2026-01-23 发布日期:2026-01-23
  • 通讯作者: 郑德印
  • 基金资助:
    国家自然科学基金(62204004)

Research Progress on Boiling Enhancement Structures for Two-Phase Immersion Cooling

WU Kewei1, HAN Yaxin1, WU Jiawei1, ZHU Yueyin1, LIU Qiang1, JI Xingqiao3, ZHENG Deyin1, 2   

  1. 1. School of Microelectronics, Tianjin University, Tianjin 300072, China; 2. State Key Laboratory of Advanced Materials for Intelligent Sensing, Tianjin University, Tianjin 300072, China; 3. The 29th Research Institute of China Electronics Technology Group Corporation, Chengdu 610036, China
  • Received:2025-12-17 Revised:2026-01-19 Online:2026-01-23 Published:2026-01-23

摘要: 随着人工智能和集成电路领域的快速发展,数据中心高性能计算芯片的热功率显著上升。两相浸没式冷却凭借高效的散热效率与绿色环保的节能特性,已成为极具发展潜力的下一代数据中心散热解决方案。该技术利用冷却工质在芯片表面的相变,将热量以潜热的形式高效散放,其中影响相变效率的关键因素在于改善芯片表面湿润性和气泡动力学行为。总结微米尺度和纳米尺度结构对两相浸没式冷却性能的影响因素与增强机制,并对近几年微纳复合结构的研究成果进行整理对比,分析当前两相浸没式冷却技术的受限因素,并进一步提出了集成均热板式浸没式冷却方案,为未来的技术发展提供参考。

关键词: 两相浸没式冷却, 沸腾增强结构, 热管理, 临界热通量, 均热板

Abstract: With the rapid advancement in artificial intelligence and integrated circuit technology, the thermal power of high-performance computing chips in data centers has significantly increased. Two-phase immersion cooling has emerged as a highly promising next-generation cooling solution for data centers due to its efficient heat dissipation and eco-friendly energy-saving characteristics. This technology leverages the phase transition of the cooling fluid on the chip surface to efficiently dissipate heat in the form of latent heat. Key factors influencing phase transition efficiency include improving chip surface wettability and bubble dynamics. This paper summarizes the influencing factors and enhancement mechanisms of micro- and nanoscale structures on two-phase immersion cooling performance. It reviews and compares recent research findings on micro-nano composite structures, analyzes the current limitations of two-phase immersion cooling technology, and proposes an integrated heat spreader immersion cooling solution to provide reference for future technological development.

Key words: two-phase immersion cooling, boiling enhancement structures, thermal management, critical heat flux, vapor chamber