耦合声子晶体对声波器件品质因子的提高*

doi:10.16257/j.cnki.1681-1070.2025.0101

电子与封装 ›› 2025, Vol. 25 ›› Issue (9): 090403 . doi: 10.16257/j.cnki.1681-1070.2025.0101

耦合声子晶体对声波器件品质因子的提高^*

黄泽宙¹，胡婉雪¹，沈宇恒¹，方照诒²，沈坤庆¹

1. 福州大学物理与信息工程学院，福州 350108；2. 闽都创新实验室，福州 350108

收稿日期:2025-01-21 出版日期:2025-09-28 发布日期:2025-03-06
作者简介:黄泽宙(1999—)，男，福建上杭人，硕士研究生，从事半导体器件仿真和制备研究。

Enhancement of the Quality Factor of Acoustic Wave Devices by Coupled Phononic Crystals

HUANG Zezhou¹, HU Wanxue¹, SHEN Yuheng¹,FANG Zhaoyi ²,SHEN Kunqing¹

1. Collegeof Physics and Information Engineering,Fuzhou University, Fuzhou 350108, China; 2. Fujian Science & Technology Innovation Laboratory for Optoelectronic Information ofChina, Fuzhou 350108, China

Received:2025-01-21 Online:2025-09-28 Published:2025-03-06

摘要/Abstract

摘要： 提出一种基于耦合声子晶体的氮化镓声表面波谐振器结构，旨在提高器件品质因子。为了验证该结构的可行性，采用COMSOL仿真软件，比较了基于一维声子晶体反射栅和金属反射栅的声表面波谐振器。仿真结果表明，一维声子晶体反射栅的传输损耗为-24.29 dB，而金属反射栅的传输损耗仅为-15.5 dB。设计了具有100对叉指换能器、20对金属反射栅、电极宽度400 nm的声表面波谐振器，其品质因子为2 455。通过优化声子晶体尺寸，器件的品质因子显著提升至3 910，相比传统金属反射栅结构提高了60%以上，展现出卓越的性能。

关键词: 氮化镓, 声表面波谐振器, 声子晶体, 品质因子, 传输损耗

Abstract: A gallium nitride surface acoustic wave resonator structure based on coupled phononic crystals is proposed to improve the device quality factor. To verify the feasibility of the structure, COMSOL simulation software is used to compare surface acoustic wave resonators based on one-dimensional phononic crystal reflective gratings and metal reflective gratings. The simulation results show that the transmission loss of one-dimensional phononic crystal reflector gratings is -24.29 dB, while the transmission loss of metal reflector gratings is only -15.5 dB. A surface acoustic wave resonator with 100 pairs of interdigital transducers, 20 pairs of metal reflector gratings, and an electrode width of 400 nm is designed, with a quality factor of 2 455. By optimizing the size of the phononic crystal, the quality factor of the device has been significantly improved to 3 910, which is over 60% higher than traditional metal reflector grating structures and demonstrates excellent performance.

Key words: gallium nitride, surface acoustic wave resonator, phononic crystal, quality factor, transmission loss

中图分类号:

TN65
O735

黄泽宙，胡婉雪，沈宇恒，方照诒，沈坤庆. 耦合声子晶体对声波器件品质因子的提高^*[J]. 电子与封装, 2025, 25(9): 090403 .

HUANG Zezhou, HU Wanxue, SHEN Yuheng,FANG Zhaoyi ,SHEN Kunqing. Enhancement of the Quality Factor of Acoustic Wave Devices by Coupled Phononic Crystals[J]. Electronics & Packaging, 2025, 25(9): 090403 .

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中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

耦合声子晶体对声波器件品质因子的提高^*

Enhancement of the Quality Factor of Acoustic Wave Devices by Coupled Phononic Crystals

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