关键词: 熔丝；多晶熔丝；熔断；180 nm工艺

Abstract: With the rapid development of integrated circuit industry, fuse circuit is more and more widely used in IC chips. In order to improve the yield of IC manufacturing, fuse-based redundant circuits are often used in IC design. By exploring and studying the fusing characteristics of poly-fuses in 180nm process, the reference values of fusing characteristics of poly-fuses of various sizes are given, which can meet the different requirements of integrated circuit design for programming conditions and fuse resistance values after programming. By choosing different types of poly-fuse size, integrated circuit designers can flexibly design the voltage and current generator circuit around the fuse, and greatly improve the success rate of poly-fuse design in 180nm process. By optimizing the fuse device structure, programming conditions and other parameters to achieve different application requirements of fuse production.

Key words: fuse; poly-fuse; fusing; 180 nm process