关键词: 低温共烧陶瓷, 加速度计, 微机械加工, 三维集成

Abstract: Low temperature co-fired ceramic (LTCC)technology is the mainstream technology to achieve miniaturization and high-density integration of electronic equipment.It is suitable for high temperature and severe environment.Differential capacitance accelerometers are introduced,which have four cantilever beams and a sensitive mass block embedded in the LTCC multilayer substrate.The differential capacitance pairs between the mass block and the upper and lower capacitor plates are composed by printed electrodes.The manufacturing difficulties and the fabrication methods for the micro-mechanical LTCC accelerometer are discussed,and the LTCC accelerometers with various structures are realized.

Key words: accelerometer, ceramic micromachining, three-dimensional integration, low temperature co-fired ceramic, accelerometer, ceramic micromachining, three-dimensional integration