中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2020, Vol. 20 ›› Issue (6): 060401 . doi: 10.16257/j.cnki.1681-1070.2020.0601

• 微电子制造与可靠性 • 上一篇    下一篇

一种250 V高动态阻抗恒流器件优化设计

孟培培,乔明   

  1. 电子科技大学电子薄膜与集成器件国家重点实验室,成都 610054
  • 接受日期:2020-02-26 出版日期:2020-06-17 发布日期:2020-03-04
  • 作者简介:孟培培(1994—),男,山东济宁人,电子科技大学硕士研究生,主要从事功率半导体器件及高压功率集成技术方向的研究工作。

Optimal Design of a 250 V High Dynamic Impedance Current Regulating Diode

MENG Peipei, QIAO Ming   

  1. State Key Laboratory of Electronic Thin Films and Integrated Device, UESTC,Chengdu 610054, China
  • Accepted:2020-02-26 Online:2020-06-17 Published:2020-03-04

摘要: 设计了一种250 V高动态阻抗恒流器件,通过在外延层中刻蚀填充氧化槽,形成体内横向沟道结构,提升恒流器件动态阻抗,使器件具有优异的恒流特性。利用MEDICI仿真软件对器件的外延层厚度和浓度、氧化槽深度、调沟注入剂量及栅氧厚度等参数进行模拟仿真,探究各参数对器件特性的影响。最终设计得到的恒流器件击穿电压为300 V,夹断电压约3.5 V,恒流工作区间为5 ~250 V,在20 V条件下动态阻抗达到189 MΩ?μm,相较于传统恒流器件提升十几倍以上。建立解析模型后采用混合仿真模式对典型LED驱动电路进行模拟,结果显示负载电流相对波动变化率仅为1.5%,实现了LED负载的恒流驱动。

关键词: 恒流器件, 击穿电压, 夹断电压, 动态阻抗, LED驱动

Abstract: A 250 V current regulating diode (CRD) with high dynamic impedance is designed in detail. The device acquires excellent current regulating characteristics by etching and filling the oxide trench to form a lateral channel structure in the epitaxy layer, which can enhance the dynamic impedance of the CRD. In order to explore the influence of the various parameters on the characteristics of the device, MEDICI simulations are performed to analyze the thickness and concentration of the epitaxy layer, the depth of the oxide trench, the implantation dose of the depletion channel and the thickness of the gate oxide. The results of the device optimization show that the breakdown voltage is 300 V, the pinch-off voltage is about 3.5 V, the current regulating range is 5 V to 250 V, and the dynamic impedance reaches 189 MΩ?μm under 20 V forward voltage, which is more than ten times higher compared with the traditional CRD. A typical circuit for driving light emitting diode (LED) is simulated through hybrid simulation model after creating the analytical model of the CRD. The relative fluctuation rate of load current is only 1.5%, indicating that LEDs have been driven well under a constant current.

Key words: current regulating diode, breakdown voltage, pinch-off voltage, dynamic impedance, LED driver

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