中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2023, Vol. 23 ›› Issue (7): 070403 . doi: 10.16257/j.cnki.1681-1070.2023.0094

• 材料、器件与工艺 • 上一篇    下一篇

65 nm工艺SRAM中能质子单粒子效应研究

陈锡鑫1;殷亚楠1;高熠1;郭刚2;陈启明2   

  1. 1.中国电子科技集团公司第五十八研究所,江苏 无锡?214035;2.中国原子能科学研究院抗辐射应用技术创新中心,北京 102413
  • 收稿日期:2023-02-14 出版日期:2023-07-26 发布日期:2023-07-26
  • 作者简介:陈锡鑫(1989—),男,江苏无锡人,本科,工程师,从事微电子技术领域研究。

Research of Intermediate Energy Proton InduceSingle EventEffect for 65 nm SRAM

CHEN Xixin1, YING Yanan1, GAO Yi1, GUO Gang2, CHEN Qiming2   

  1. 1.China Electronics Technology GroupCorporation No. 58 Research Institute, Wuxi 214035, China;2.Innovative Center of Radiation Hardening Applied Technology, ChinaInstitute of Atomic Energy, Beijing 102413, China
  • Received:2023-02-14 Online:2023-07-26 Published:2023-07-26

摘要: 基于一款带错误检测与纠正(EDAC)功能的65nm体硅CMOS SRAM,开展了中能质子对纳米级集成电路单粒子效应影响的研究。在SRAM本征工作模式和EDAC模式下,得到了2组试验结果。分析试验数据发现:在重离子与中能质子试验中,采用商用6T设计规则的电路均未发生单粒子闩锁现象,但都发生了单粒子多位翻转现象;质子单粒子效应引起的错误数已饱和,而重离子单粒子效应引起的错误数则随能量不断增加,该现象与2种粒子引起单粒子效应的机理有关。质子与重离子饱和截面的差异是由质子核反应的概率导致的,但空间错误率相近。此次试验很好地探索了中能质子对SRAM电路的影响,明确了质子与重离子导致单粒子错误的异同,为SRAM在航天上的应用奠定了基础。

关键词: 辐射效应, 单粒子效应, 中能质子, SRAM

Abstract: Based on a 65 nm bulk silicon CMOS SRAM with error detection and correction (EDAC), a research of the effect of intermediate energy proton on single event effect of nanoscale integrated circuits is conducted.Two sets of experimental results are obtained in SRAM intrinsic operation mode and EDAC mode. Analyzing the experimental data, it is found that in both the heavy ion and medium energy proton tests, the single event latch-up is not occurred with the 6T cell in commercial design rules, but the single-particle multi-bit flip-flop is happened in experiments.The number of errors caused by the proton single event effect is saturated, while the number of errors caused by the heavy ion single event effect is increasing with energy, and this phenomenon is related to the mechanism of the single event effect caused by the two particles. The saturation cross is different between proton and heavy ions, due to probability of atomic nucleus reaction, but the error rate is similar to each other. This experiment has well explored the effect of intermediate energy protons on SRAM circuits, the similarities and differences between protons and heavy ions leading to single-particle errors are clarified, and the foundation for SRAM applications in space is laid.

Key words: radiation effect, single event effect, intermediate energy proton, SRAM

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