中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

导航

电子与封装 ›› 2025, Vol. 25 ›› Issue (2): 020202 . doi: 10.16257/j.cnki.1681-1070.2025.0022

• 封装、组装与测试 • 上一篇    下一篇

基于FOPLP工艺多I/O芯片封装的可靠性研究及优化*

江京,刘建辉,陶都,宋关强,李俞虹,钟仕杰   

  1. 天芯互联科技有限公司,广东 深圳?518000
  • 收稿日期:2024-09-19 出版日期:2025-02-27 发布日期:2025-02-27
  • 作者简介:江京(1983—),男,福建龙岩人,硕士,天芯互联科技有限公司总经理,主要从事晶圆级封装、系统级封装和板级封装等领域的相关工作。

Reliability Study and Optimization of Multi-I/O Chip Packaging Based on FOPLP Process

JIANG Jing, LIU Jianhui, TAO Du, SONG Guanqiang, LI Yuhong, ZHONG Shijie   

  1. Sky Chip Interconnection Technology Co., Ltd., Shenzhen 518000,China
  • Received:2024-09-19 Online:2025-02-27 Published:2025-02-27

摘要: 随着封装工艺的进步,扇出型板级封装(FOPLP)工艺因其具有高集成度、低成本、更好的性能和更广泛的应用领域等优势而备受关注。针对基于FOPLP工艺封装的多I/O芯片产品可靠性开展了系统研究。探索和分析了产品在偏压高加速温湿度应力测试(BHAST)中的漏电问题,根据失效分析结果,将重点聚焦于爬胶高度和产品应力。同时,通过试验设计(DOE)验证了改善产品的银胶量和固定加工参数。针对多I/O芯片应力问题,采用仿真模拟优化应力分布,产品成功通过BHAST可靠性测试,满足130 ℃、85 %RH条件下连续工作264 h的BHAST可靠性要求,对提升多I/O类产品整体性能和市场竞争力具有重要意义。

关键词: 扇出型板级封装, 失效分析, 可靠性, 热应力仿真

Abstract: With the advancement of packaging process, fan-out plate level packaging (FOPLP) process has attracted much attention due to its high integration, low cost, better performance and wider application areas. The reliability of multi-I/O chip products packaged based on FOPLP process is studied systematically. The leakage problem of products in bias high acceleration temperature and humidity stress test (BHAST) is explored and analyzed. According to the failure analysis results, the focus is placed on the climbing glue height and product stress. At the same time, the silver glue content and fixed processing parameters for improving products are verified by the design of experiment (DOE). Aiming at the stress problem of multi-I/O chip, simulation is used to optimize the stress distribution. The products successfully pass the BHAST reliability project and meet the BHAST reliability requirements of continuous operation for 264 h at 130 ℃ and 85 %RH, which is of great significance for improving the overall performance and market competitiveness of multi-I/O products.

Key words: fan-out panel level packaging, failure analysis, reliability, thermal stress simulation

中图分类号: