中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装

• 封装、组装与测试 •    下一篇

低温银烧结技术的可靠性研究进展

王奔1,朱志宏1,贾少博1,汪宝华2,丁苏1,李万里1   

  1. 1. 江南大学智能制造学院,江苏 无锡  214401;2. 无锡芯动半导体科技有限公司,江苏 无锡  214401
  • 收稿日期:2025-06-05 修回日期:2025-08-03 出版日期:2025-12-10 发布日期:2025-12-10
  • 通讯作者: 李万里
  • 基金资助:
    江苏省自然科学基金(BK20221095)

Research Progress on the Reliability of Low-Temperature Silver Sintering Technology

WANG Ben1, ZHU Zhihong1, JIA Shaobo1, WANG baohua2, DING Su1, LI Wanli1   

  1. 1. School of Intelligent Manufacturing, Jiangnan University, Wuxi 214401, China; 2. Wuxi Xindong Semiconductor Technology Co., Ltd., Wuxi 214401, China
  • Received:2025-06-05 Revised:2025-08-03 Online:2025-12-10 Published:2025-12-10

摘要: 随着大功率电子技术的飞速发展,芯片的工作温度持续攀升。烧结微、纳米银凭借其优异的导电性、导热性和机械强度,成为最具有潜力的高温封装互连材料之一。然而,烧结银接头在经受长期高温环境和频繁开关条件下的可靠性表现尚未得到全面验证。本文通过总结过去烧结银接头在高温老化测试、热循环/热冲击测试和功率循环测试下的可靠性研究,系统梳理了低温银烧结技术的材料与工艺可靠性,深入剖析了导致接头劣化的两大关键机理:热驱动力和热应力影响。通过分析,旨在总结当前面临的关键技术挑战,并探索有效提升烧结银接头可靠性的策略。

关键词: 烧结银, 金属化, 老化, 热应力, 可靠性

Abstract: With the rapid development of high-power electronic devices, the operating temperature of chips has been continuously rising. Sintered micro- and nano-silver, due to their excellent conductivity, thermal conductivity, and mechanical strength, have become one of the most promising packaging materials. However, the long-term reliability of sintered silver joints under high-temperature environments and frequent switching conditions has not been fully validated. By summarizing the reliability research on sintered silver joints in high-temperature aging, thermal cycling, thermal shock and power cycling tests, this study systematically explains the material and process reliability of low-temperature silver sintering technology. It deeply analyzes the two key mechanisms that lead to reliability degradation: the thermal driving force effect and thermal stress impact. Through this analysis, the study aims to summarize the current key technical challenges and explore effective strategies to improve the reliability of sintered silver joints.

Key words: sintered silver, metallization layer, aging, thermal stress, reliability