中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2016, Vol. 16 ›› Issue (5): 14 -17. doi: 10.16257/j.cnki.1681-1070.2016.0055

• 封装、组装与测试 • 上一篇    下一篇

一种混合工艺型微波密封腔体的研制

王辰,陈侃,郑冬侠   

  1. 中国电子科技集团公司第40研究所,安徽 蚌埠 233010
  • 收稿日期:2016-01-21 出版日期:2016-05-20 发布日期:2016-05-20
  • 作者简介:王辰(1988—),男,安徽蚌埠人,毕业于安徽工程大学,学士学位,现在中国电子科技集团公司第40研究所从事金属玻璃封装产品的研发工作。

The Development of a Hybrid-technique-manufactured Microwave Sealed Cavity

WANG Chen,CHEN Kan,ZHENG Dongxia   

  1. China Electronics Technology Group Corporation No.40 Research Institute,Bengbu 233010,China
  • Received:2016-01-21 Online:2016-05-20 Published:2016-05-20

摘要: 射频连接器在集成电路中的应用越来越广泛,射频连接器界面的复杂性决定了具有射频绝缘子的腔体的加工难度。介绍了一种兼具馈电绝缘子及射频绝缘子的微波密封腔体的研制。根据该产品结构特点和技术要求,抛弃了以往单一方法的制造工艺,结合了烧结与焊接的工艺特点,使用了混合工艺加工,解决了模具设计及工艺问题。经测试,该密封腔体中射频绝缘子电压驻波比(VSWR)小于1.2@40 GHz,插入损耗≤0.7 dB,泄漏率≤1×10-3Pa·cm3/s。

关键词: 微波密封腔体, 焊接, 烧结, 混合工艺

Abstract: The use of RF connector in integrated circuit is wide.However,the complexity of the interface of the RF connector determines the degree of difficulty of manufacturing the housing that contains RF insulators.In this article,the development of a microwave sealing housing that contains feeder insulators and RF insulators is introduced.Given the structure characteristics and technique requirements of this product,it discards the old unitary manufacturing processes,integrates the craft characteristics of sintering and soldering,uses hybrid manufacture techniques,and solves the issues regarding the moulding design and processing.Through testing,the results below regarding the RF insulators in this sealing housing are found,VSWR is less than 1.2@40 GHz,insertion loss is equal to or less than 0.7 dB,leakage rate is equal to or less than 1×10-3Pa·cm3/s.

Key words: microwave sealed cavity, sintering, soldering, hybrid manufacture techniques

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