中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2021, Vol. 21 ›› Issue (6): 060204 . doi: 10.16257/j.cnki.1681-1070.2021.0612

• 封装、组装与测试 • 上一篇    下一篇

一种用于引线键合工艺的自动在线检测技术

李茂松;胡琼;朱虹姣   

  1. 中国电子科技集团公司第二十四研究所,重庆 400060
  • 收稿日期:2020-12-23 出版日期:2021-06-23 发布日期:2021-01-26
  • 作者简介:李茂松(1963—),男,四川射洪人,本科,高级工程师,长期从事高可靠性集成电路封装工艺研究。

An Automatic On-lineInspection Technology for Wire Bonding Process

LI Maosong, HU Qiong, ZHU Hongjiao   

  1. Sichuan Institute of Solid-State Circuits, ChinaElectronics Technology Group Corp., Chongqing 400060, China
  • Received:2020-12-23 Online:2021-06-23 Published:2021-01-26

摘要: 详细论述了引线键合在线自动检测技术原理及实现方法,分析了影响检测准确性的因素,并提出了相应的解决措施。基于机器视觉系统,提出了一种金丝球焊键合在线自动检测法,通过对键合引线形成的二维图像进行数字化处理,实现了对键合引线连接正确性、植球完整性、焊球直径、引线断裂、偏移、塌陷等缺陷的在线检测。该技术使用机器自动检测代替人工检测,使检测效率提升了80%左右,检准率达到100%。

关键词: 自动检测, 在线检测, 金丝球焊检测, 机器视觉系统

Abstract: The principle and implementation method of wire bonding automatic on-line inspection technology are discussed in detail, the factors affecting the inspection accuracy are analyzed, and the corresponding solution methods are proposed. Based on the machine vision system, an on-line automatic method of gold wire ball bonding was proposed. Through the digital processing of the two-dimensional image formed by the bonding wire, online Inspecting the correctness of bonding wire, the completeness of the bonding ball, the diameter of the ball, defects such as bonding wire flying-off, offset and collapse of the wire was realized. This technology uses machine automatic inspection instead of manual inspection, which improves the inspection efficiency about eighty percent and the inspection accuracy reached perfection.

Key words: automaticinspection, on-lineinspection, goldwirebondinginspection, machinevisionsystems

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