中国电子学会电子制造与封装技术分会会刊

中国半导体行业协会封测分会会刊

无锡市集成电路学会会刊

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电子与封装 ›› 2026, Vol. 26 ›› Issue (5): 050403 . doi: 10.16257/j.cnki.1681-1070.2026.0057

• 材料、器件与工艺 • 上一篇    下一篇

GaN HEMT可靠性研究综述*

杨天晴,邢宗锋,母欣荣,赵钢,文科,罗俊   

  1. 中国电子科技集团公司第二十四研究所,重庆  400060
  • 收稿日期:2025-09-23 出版日期:2026-06-02 发布日期:2025-12-05
  • 作者简介:杨天晴(2000—),男,重庆人,硕士,助理工程师,主要从事集成电路可靠性研究工作。

Review of GaN HEMT Reliability Research

YANG Tianqing, XING Zongfeng, MU Xinrong, ZHAO Gang, WEN Ke, LUO Jun   

  1. China Electronics Technology Group Corporation No.24 Research Institute, Chongqing 400060, China
  • Received:2025-09-23 Online:2026-06-02 Published:2025-12-05

摘要: 以GaN为代表的第三代宽禁带半导体,凭借卓越的物理特性,正在引领电力电子领域的新一轮技术革命。GaN高电子迁移率晶体管(HEMT)在实现高效、高频、小型化的新一代电力电子系统中展现出巨大潜力。然而,与成熟的Si基技术相比,GaN器件的可靠性问题是制约其大规模商业化应用的核心瓶颈。对GaN器件的可靠性研究现状进行了系统性的回顾与总结。阐述了典型GaN HEMT的基本结构与工作原理,分析了其关键电学参数。剖析了GaN器件在复杂电、热、机械应力下的主要失效机制,重点探讨了由逆压电效应、陷阱效应、短路以及热应力集中等引发的器件退化与失效机理。在此基础上,进一步梳理和介绍了提升器件可靠性的关键技术,涵盖了从优化材料外延生长、革新热管理方案到采用先进的器件结构设计等多个层面。旨在为从事GaN技术研究与应用的科研人员和工程师提供参考,以期推动GaN器件可靠性问题的解决,加速其在关键领域的应用进程。

关键词: GaN, 高电子迁移率晶体管, 可靠性分析

Abstract: Third-generation wide-bandgap semiconductors, represented by GaN, are spearheading a new technological revolution in power electronics due to their superior physical properties. GaN high electron mobility transistors (HEMTs) demonstrate immense potential for realizing next-generation power electronic systems that are highly efficient, high-frequency, and compact. However, compared to mature Si-based technologies, reliability issues in GaN devices remain a critical bottleneck restricting their large-scale commercialization. A systematic review and summary of the current state of research on GaN device reliability is conducted. The fundamental structure and operating principles of a typical GaN HEMT are described, and its key electrical parameters are analyzed. The primary failure mechanisms of GaN devices under complex electrical, thermal, and mechanical stress are analyzed, with a focus on the mechanisms of device degradation and failure caused by the inverse piezoelectric effect, trapping effects, short circuits, and thermal stress concentration. Building on this foundation, key technologies for enhancing device reliability are further outlined and discussed, covering various aspects from optimizing material epitaxial growth and innovating thermal management solutions to adopting advanced device structures, aiming to provide a reference for scientists and engineers engaged in GaN technology research and application, and to promote the resolution of GaN device reliability challenges and accelerate their adoption in critical application domains.

Key words: GaN, high electron mobility transistor, reliability analysis

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