中国电子学会电子制造与封装技术分会会刊

中国半导体行业协会封测分会会刊

无锡市集成电路学会会刊

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电子与封装

• 封装、组装与测试 •    下一篇

表面贴装塑封芯片Die-EMC界面分层失效机理及制程优化研究

徐爱,孟强,许勇杨,刘锦松   

  1. 宁波中车时代传感技术有限公司,浙江 宁波  315021
  • 收稿日期:2026-03-31 修回日期:2026-04-23 出版日期:2026-05-13 发布日期:2026-05-13
  • 通讯作者: 徐爱

Delamination Failure Mechanism and Process Optimization of Die-EMC Interface for Surface Mount Plastic Encapsulated Chip

XU Ai, MENG Qiang, Xu Yongyang, Liu Jinsong   

  1. Ningbo CRRC Times Transducer Technology Co., Ltd., Ningbo 315021, China
  • Received:2026-03-31 Revised:2026-04-23 Online:2026-05-13 Published:2026-05-13

摘要: 塑料封装是半导体集成电路的主流封装形式,非气密结构使其易发生分层失效。针对TSSOP-8型表面贴装塑封芯片出现的高温无输出、Pin2开路失效问题,采用X射线、C-SAM、切片及EDX能谱分析,明确该类器件晶粒(Die)-塑封料(EMC)界面分层引起界面应力集中导致焊球机械拉脱,最后引脚开路的链式失效机理。将分层从“潜在可靠性风险”量化为“功能失效的直接诱因”,建立分层面积与电性能失效的关联判据,揭示热膨胀系数失配、界面活化不足、氧化与吸潮是分层主导诱因。在此基础上,提出等离子清洗、氮气防氧化储存、关键工序停留时间精准管控三位一体制程优化方案。试验与批量应用表明:优化后器件经-55~155 ℃、200次温度循环后分层率由最高100%降至0%,焊球脱落与功能失效问题完全消除,器件可靠性显著提升。研究成果不依赖材料替换与结构改型,为高可靠表面贴装塑封器件的分层防控与工艺迭代提供理论依据与工程参考。

关键词: 塑料封装, 分层失效, Die-EMC界面, 失效机理, 制程优化, 可靠性, 表面贴装

Abstract: Plastic packaging is the mainstream packaging form for semiconductor integrated circuits. Its non‑hermetic structure makes it prone to delamination failure. Aiming at the high-temperature no-output and Pin 2 open-circuit failure of TSSOP-8 surface-mount plastic encapsulated chips, this paper adopts X-ray inspection, C-SAM, cross-section analysis and EDX energy spectrum analysis to clarify the chain failure mechanism of such devices: delamination at the Die-EMC interface of such devices induces interfacial stress concentration, which further causes mechanical solder ball pull-out, and ultimately results in pin open circuit failure. This study quantifies delamination from a "potential reliability risk" to a "direct inducement of functional failure", establishes the correlation criterion between delamination area and electrical performance failure, and reveals that thermal expansion coefficient mismatch, insufficient interface activation, oxidation and moisture absorption are the dominant causes of delamination. On this basis, a three-in-one process optimization scheme is proposed, including plasma cleaning, nitrogen anti-oxidation storage, and precise control of residence time in key processes. Tests and mass application results show that after optimization, following 200 temperature cycles ranging from -55 ℃ to 155 ℃, the maximum delamination rate of devices is reduced from 100% to 0%. Solder ball detachment and functional failure are completely eliminated, and the overall device reliability is significantly improved. Independent of material replacement and structural modification, the research findings provide theoretical basis and engineering reference for delamination prevention and control as well as process iteration of high-reliability surface-mount plastic encapsulated devices.

Key words: plastic packaging, delamination failure, Die-EMC interface, failure mechanism, process optimization, reliability, surface mount