中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2026, Vol. 26 ›› Issue (1): 010401 . doi: 10.16257/j.cnki.1681-1070.2026.0004

• 材料、器件与工艺 • 上一篇    下一篇

可伐合金电镀工艺技术的改进与提升

陈柱   

  1. 中国电子科技集团公司第十三研究所,石家庄  050299
  • 收稿日期:2025-05-07 出版日期:2026-01-29 发布日期:2025-06-25
  • 作者简介:陈柱(1993—),男,河北石家庄人,硕士,工程师,现从事电子封装工艺技术与质量控制工作。

Improvement and Enhancement of Kovar Alloy Electroplating Process Technology

CHEN Zhu   

  1. China Electronics Technology Group Corporation No.13 Research Institute, Shijiazhuang 050299, China
  • Received:2025-05-07 Online:2026-01-29 Published:2025-06-25

摘要: 可伐合金电镀工艺复杂,管控不当就会出现各种质量问题,其中镀层起泡、鼓包就是常见的问题。针对某可伐合金电镀并烘烤后出现鼓包的问题,利用光学显微镜、扫描电子显微镜、能谱仪、聚焦离子束和金相切片等手段来进行分析,结果表明其并非常见的镀层结合力问题,而是可伐合金电镀前处理的腐蚀时间过长,使基材表面发生过腐蚀进而分层所致。基于失效机理提出了针对性的改善措施,对于提高可伐合金的电镀质量与可靠性具有重要的参考意义。

关键词: 可伐合金, 鼓包, 电镀, 腐蚀, 失效分析

Abstract: The electroplating process for Kovar alloys is complex, and improper control can lead to various quality issues, among which blistering and bulging of the coating are common issues. To address the issue of bulging which occurred after electroplating and baking for a certain Kovar alloy, analyses have been conducted using optical microscopy, scanning electron microscopy, energy-dispersive spectroscopy, focused ion beam and metallographic sectioning. The results indicate that it is not a common issue of coating adhesion, but rather stems from excessive corrosion time during the electroplating pretreatment, which caused over-corrosion and delamination on the surface of the Kovar alloy substrate. Based on the failure mechanism, targeted improvement measures are proposed, which have important reference significance for improving the quality and reliability of Kovar alloy electroplating.

Key words: Kovar alloy, bulging, electroplating, corrosion, failure analysis

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