中国电子学会电子制造与封装技术分会会刊

中国半导体行业协会封测分会会刊

无锡市集成电路学会会刊

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电子与封装 ›› 2026, Vol. 26 ›› Issue (4): 040205 . doi: 10.16257/j.cnki.1681-1070.2026.0040

• 封装、组装与测试 • 上一篇    下一篇

温度循环载荷下功率器件失效机理研究

谢林毅1,粟浪1,程佳2,黄青树1,冉亮2   

  1. 1. 润西微电子重庆有限公司,重庆 400060;2. 华润微电子重庆有限公司,重庆 400060
  • 收稿日期:2025-08-03 出版日期:2026-04-28 发布日期:2025-12-05
  • 作者简介:谢林毅(1997—),女,重庆人,硕士,工程师,主要研究方向为功率器件可靠性与失效分析。

Research on Failure Mechanisms of Power Devices Under Temperature Cycling Loads

XIE Linyi1, SU Lang1, CHENG Jia2, HUANG Qingshu1, RAN Liang2   

  1. 1.  RunxiMicroelectronics ChongqingCo., Ltd., Chongqing 400060, China;
  • Received:2025-08-03 Online:2026-04-28 Published:2025-12-05

摘要: 功率器件作为电力电子系统的核心元件,其可靠性至关重要。当前针对功率器件在温度循环(TC)载荷下的失效机理研究尚显不足。为此,采用试验表征与失效机理分析相结合的方法,研究功率器件在温度循环载荷下的失效模式与失效机制,为后续功率器件的可靠性设计与寿命预测提供理论依据与技术参考。阐述TC试验的基本原理、试验目标及实施方法。对器件实施TC试验,获取电性参数。电性失效器件的失效分析结果表明,钝化层的破裂会使湿气入侵芯片内部,最终导致器件的热击穿失效。从材料与工艺层面提出了相应的钝化层改善方向,为产品研究提供技术参考。

关键词: 温度循环试验, 功率器件, 可靠性, 失效机理

Abstract: Power devices are the core components of power electronic systems, and their reliability is crucial. Current research on the failure mechanisms of power devices under temperature cycling (TC) loads is still insufficient. Therefore, a method combining experimental characterization with failure mechanism analysis is adopted to investigate the failure modes and mechanisms of power devices under temperature cycling loads, which provides a theoretical foundation and technical reference for the reliability design and lifetime prediction of subsequent power devices. The principles, objectives, and methods of the TC test are introduced. The devices are subjected to the TC test, and electrical parameter data are collected. Failure analysis on electrically failed devices reveals that cracks in the passivation layer allow moisture to penetrate the chip interior, ultimately leading to thermal breakdown of the devices. Corresponding improvement strategies for the passivation layer are proposed from both material and process perspectives, providing technical guidance for product development.

Key words: temperature cycling test, power devices, reliability, failure mechanisms

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