中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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功率器件封装纳米浆料材料、低温烧结工艺及机理研究进展综述

王一平1,2,于铭涵2,王润泽1,佟子睿1,冯佳运1,田艳红1,2   

  1. 1. 哈尔滨工业大学材料结构精密焊接与连接全国重点实验室,哈尔滨  150001;2. 哈尔滨工业大学郑州研究院,郑州  450000
  • 收稿日期:2024-11-07 修回日期:2025-01-06 出版日期:2025-01-20 发布日期:2025-01-20
  • 通讯作者: 田艳红
  • 基金资助:
    国家自然科学基金(52205352, U2241223)

Review on Nano Paste Materials, Low Temperature Sintering Processes and Mechanisms for Power Device Packaging

WANG Yiping1,2, YU Minghan2, WANG Runze1, TONG Zirui1, FENG Jiayun1, TIAN Yanhong1,2   

  1. 1. State Key Laboratory of Precision Welding & Joining of Materials and Structures, Harbin Institute of Technology, Harbin 150001, China; 2. Zhengzhou Research Institute, Harbin Institute of Technology, Zhengzhou, 450000, China
  • Received:2024-11-07 Revised:2025-01-06 Online:2025-01-20 Published:2025-01-20

摘要: 随着电力电子器件材料的发展,第三代宽禁带半导体(如SiC和GaN)因其优越的性能而成为功率器件的理想材料。然而,面对大功率和高温应用的挑战,传统的锡基封装材料已经难以满足需求。为此,研究者们开始关注可以低温烧结、高温服役的纳米烧结浆料。这些微米、纳米级的铜、银等浆料可以在远低于金属熔点的温度下烧结成具备高熔点、高导热、高性能的焊点结构。本文从烧结机理、烧结材料、烧结工艺三个方面讨论了近年来用于功率器件封装的烧结浆料的研究进展,具体包括纳米银、纳米铜、铜银复合和其他纳米级烧结材料,以及他们适配的热压烧结工艺、无压烧结工艺、薄膜烧结技术等工艺,为烧结浆料的进一步发展提供参考。

关键词: 纳米浆料, 烧结, 功率器件, 电子封装技术, 烧结纳米铜

Abstract: With the development of materials for power electronic devices, third-generation wide-bandgap semiconductors (such as SiC and GaN) have emerged as ideal materials for power devices due to their remarkable performance. However, traditional tin-based packaging materials have difficulties to meet the requirement of high-power and high-temperature applications. As a result, researchers have begun to focus on nano pastes that can be sintered at low temperatures and serve at high temperatures. These micro and nano scale particles, including copper and silver, can be sintered into solder joint structures with high melting point, high thermal conductivity, and high performance. This article discusses the recent research advancements in sintering pastes used for power device packaging from three perspectives: sintering mechanisms, sintering materials, and sintering processes. Specific topics include micro and nano Ag paste, Cu paste, Ag-Cu composites, and other metallic pastes, as well as their corresponding processes such as thermal pressure sintering, pressureless sintering, and thin-film sintering techniques. These insights provide valuable references for the further development of sintering pastes.

Key words: nano paste, sinter, power devices, electronics packaging technology, nano sinter Cu