关键词: MEMS, SOI, 高温电路, 加速度计, 传感器

Abstract: This paper introduces a high-temperature MEMS (Micro-Electro-Mechanical System) accelerometer sensor. The MEMS sensitive element and ASIC circuit are both designed and manufactured using the SOI process. The MEMS sensitive element adopts the comb capacitor principle. The ASIC circuit includes a preamplifier based on the switched capacitor circuit architecture, a gain zero adjustment circuit, a low-pass filter circuit, and an on-chip OSC circuit, a reference, and a fuse-type OTP circuit unit. The device is packaged in a ceramic tube shell, with a range of ±15 g, a nonlinearity of 0.27%, and The zero-bias stability at 225 ℃ is better than 2mg. The device exhibits good temperature characteristics and high stability in the temperature range of -55~225 ℃, which can meet the high-temperature application requirements of deep oil and gas exploration and aerospace applications.

Key words:  MEMS, SOI, high-temperature circuit, accelerometer, sensor