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电子与封装

• 封装、组装与测试 •    下一篇

透射模式在声扫试验中的实际应用价值

刘颖   

  1. 成都天奥技术发展有限公司,成都  611730
  • 收稿日期:2026-04-18 修回日期:2026-07-24 出版日期:2026-07-28 发布日期:2026-07-28
  • 通讯作者: 刘颖

Research on the Practical Application Value of Transmission Mode in Scanning Acoustic Microscopy

LIU Ying   

  1. Chengdu Tian'ao Technology Development Co., Ltd., Chengdu 611730, China
  • Received:2026-04-18 Revised:2026-07-24 Online:2026-07-28 Published:2026-07-28

摘要: 在超声扫描显微镜(SAM)试验中,通常通过反射模式进行缺陷判定,透射模式仅作为芯片粘接界面分层的次要判据。但反射模式易受界面特性、材料属性等多种因素干扰,在特定条件下可能导致误判。通过开展对透射扫描的单独应用及其在特殊试验现象时与反射模式的协同应用实例的分析与研究,发现了透射扫描的实际应用价值远超其仅作为芯片粘接层分层次要判据的原有定位,为同行业者提供了另一角度的试验现象分析方法。

关键词: 透射扫描, 超声扫描, 透射模式, 反射模式, 芯片粘接界面分层, 可靠性

Abstract: In ultrasonic scanning microscopy(SAM)testing, defect detection is typically performed using reflection mode, while transmission mode is used only as a secondary criterion for detecting delamination at chip bonding interfaces. However, reflection mode is susceptible to interference from various factors, such as interface characteristics and material properties, which may lead to misjudgments under specific conditions. Through analysis and research on the standalone application of transmission scanning, as well as its synergistic use with reflection mode in specific testing scenarios, it was found that the practical value of transmission scanning far exceeds its original role as a  criterion for determining the layering of chip bonding layers. This provides industry peers with an alternative approach to analyzing testing phenomena.

Key words: transmission scanning, ultrasonic scanning, transmission mode, reflection mode, chip bonding interface delamination, reliability