中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装

• 封装、组装与测试 •    下一篇

基于基板折叠的多面立体封装技术研究进展

毕博1,2,潘碑2,3,张晋2,成海峰2,葛振霆2,刘子玉1   

  1. 1. 复旦大学微电子学院,上海  200433;2. 南京电子器件研究所,南京  210016;3. 电子科技大学电子科学与工程学院,成都  611731
  • 收稿日期:2025-08-07 修回日期:2025-08-29 出版日期:2025-09-15 发布日期:2025-09-15
  • 通讯作者: 刘子玉
  • 基金资助:
    五十五所基础性研究项目支持(2308N151)

Research Progress on Substrate Folding-Based Multifaceted 3D Packaging Technology

BI Bo1,2, PAN Bei2,3, ZHANG Jin2, CHENG Haifeng2, GE Zhenting2, LIU Ziyu1   

  1. 1. School of Microelectronics, Fudan University, Shanghai 200433, China; 2. Nanjing Electronic Devices Institute, Nanjing 210016, China; 3. School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
  • Received:2025-08-07 Revised:2025-08-29 Online:2025-09-15 Published:2025-09-15

摘要: 基于基板折叠的多面立体封装由互不平行的基板构成,是一种特殊的3D立体封装,具有较高的功能密度和散热能力,在传感器、医疗设备等多种应用场景下有较大研究价值。介绍了基于基板折叠的多面立体封装的概念与国内外研究现状,系统总结了封装的典型结构、基板材料、组装工艺、散热及代表性应用。重点分析了基于基板折叠的多面立体封装与其他类型3D封装之间的差异,探讨了该封装技术的独特优势与亮点,并对该技术在有源相控阵T/R组件和光电共封领域的发展前景进行了展望。

关键词: 多面立体封装, 传感器, 3D封装, T/R组件, 光电共封

Abstract: Substrate folding-based multifaceted 3D packaging, featuring non-parallel substrates, represents a specialized form of three-dimensional packaging technology with high functional density and superior thermal dissipation capabilities. It demonstrates significant research value across various applications including sensors and medical devices. This paper introduces the concept of substrate folding-based multifaceted 3D packaging and reviews its current research status domestically and internationally. It systematically summarizes the typical architectures, substrate materials, assembly processes, thermal management solutions, and representative applications of the packaging technologies. Emphasis is placed on analyzing the distinctions between substrate folding-based multifaceted 3D packaging and other forms of 3D packaging approaches. The paper explores the unique advantages and salient features of this packaging technology and discusses its development prospects in the field of active phased array T/R modules and Co-packaged optics.

Key words: multifaceted 3D packaging, sensors, 3D packaging, T/R module, Co-packaged optics