中国电子学会电子制造与封装技术分会会刊

中国半导体行业协会封测分会会刊

无锡市集成电路学会会刊

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电子与封装

• 综述 •    下一篇

面向2.5D/3D IC的供电网络建模与去耦电容优化方法综述

罗挺1,林宇川2,徐宁2,成元庆3   

  1. 1. 深圳市硅格半导体有限公司,广东 深圳  518057;2. 武汉理工大学信息工程学院,武汉  430074;3. 北京航空航天大学集成电路科学与工程学院,北京  100191
  • 收稿日期:2026-06-30 修回日期:2026-07-24 出版日期:2026-07-28 发布日期:2026-07-28
  • 通讯作者: 成元庆
  • 基金资助:
    国家自然科学基金(92373205);北京市自然科学基金(Z230002);深圳市重点产业研发计划(ZDCY20250901112804006)

Review of Power Delivery Network Modeling and Decoupling Capacitor Optimization Methods for 2.5D/3D ICs

LUO Ting1, LIN Yuchuan2, XU Ning2, CHENG Yuanqing3   

  1. 1. SiliconGo Semiconductor Co., Ltd., Shenzhen 518057, China; 2. School of Information Engineering, Wuhan University of Technology, Wuhan 430074, China; 3. School of Integrated Circuit Science and Engineering, Beihang University, Beijing 100191, China
  • Received:2026-06-30 Revised:2026-07-24 Online:2026-07-28 Published:2026-07-28
  • Supported by:

摘要: 先进封装技术向2.5D/3D集成演进的进程中,供电网络已由传统芯片-封装-电路板层级结构演化为芯粒、中介层、硅通孔(TSV)、微凸点、封装基板及电压调节模块共同耦合的复杂供电网络(PDN)。在低电压、大电流和高开关频率条件下,PDN中的阻抗谐振、电压降、开关噪声(SSN)及多端口耦合问题日益突出,已成为制约先进封装系统性能与可靠性的重要因素。系统梳理面向2.5D/3D集成电路(IC)的PDN建模、联合分析与去耦电容优化方法的研究进展。相关建模方法主要包括基于传输矩阵和分布式等效网络的电源/地平面快速建模,以及面向硅中介层和TSV结构的分段建模,并通过电阻、电感、电导和电容(RLGC)参数提取、矩阵连接及多端口网络级联,实现频域阻抗、稳态电压降与时域开关噪声的联合分析。去耦电容优化围绕电容位置、类型和数量的协同配置,采用启发式算法、强化学习和多目标协同优化等方法提高设计空间搜索效率。结合芯粒异构集成供电架构、多物理场协同优化和AI驱动设计自动化的发展趋势,进一步讨论未来PDN设计面临的关键挑战,为先进封装系统的电源完整性分析与系统级协同设计提供参考。

关键词: 先进封装, 供电网络, 去耦电容, 启发式算法, 机器学习

Abstract: As advanced packaging technologies evolve toward 2.5D/3D integration, the power delivery architecture has transitioned from the conventional chip-package-printed circuit board hierarchy to a complex power distribution network (PDN) in which chiplets, interposers, through-silicon vias (TSVs), microbumps, package substrates, and voltage regulator modules are tightly coupled. Under low-voltage, high-current, and high-switching-frequency conditions, impedance resonances, voltage drops, simultaneous switching noise (SSN), and multiport coupling in the PDN have become increasingly prominent, posing critical constraints on the performance and reliability of advanced packaging systems. This paper systematically reviews recent advances in PDN modeling, joint analysis, and decoupling capacitor optimization for 2.5D/3D integrated circuits (ICs). The modeling methods mainly include rapid modeling of power/ground planes based on transfer matrices and distributed equivalent networks, as well as segmented modeling of silicon interposers and TSV structures. By combining resistance, inductance, conductance, and capacitance (RLGC) parameter extraction, matrix-based interconnection, and multiport network cascading, these methods enable joint analysis of frequency-domain impedance, steady-state voltage drop, and time-domain switching noise. Decoupling capacitor optimization focuses on the coordinated configuration of capacitor locations, types, and quantities, and employs heuristic algorithms, reinforcement learning, and multi-objective collaborative optimization to improve the efficiency of design-space exploration. In light of emerging trends in heterogeneous chiplet power delivery architectures, multiphysics collaborative optimization, and artificial intelligence (AI)-driven design automation, this paper further discusses the key challenges facing future PDN design and provides a reference for power integrity analysis and system-level collaborative design of advanced packaging systems.

Key words: advanced packaging, power delivery network, decoupling capacitors, heuristic algorithms, machine learning