中国电子学会电子制造与封装技术分会会刊

中国半导体行业协会封测分会会刊

无锡市集成电路学会会刊

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电子与封装

• 封装、组装与测试 •    下一篇

倒装芯片技术的核心工艺及发展脉络

陈伶俐1,胡立雪1,廖希异1,何万波1,李艳琼1,李曦頔1,贺从勇2   

  1. 1. 中国电子科技集团第二十四研究所,重庆  400060;2. 中电科芯片技术(集团)有限公司,重庆  400060
  • 收稿日期:2026-06-17 修回日期:2026-09-03 出版日期:2026-09-07 发布日期:2026-09-07
  • 通讯作者: 陈伶俐
  • 基金资助:
    科技部国家重点研发计划(2024YFB2808600)

Development Trajectory and Core Processes of Flip-Chip Technology

CHEN Lingli1, HU Lixue1, LIAO Xiyi1, HE Wanbo1, LI Yanqiong1, LI Xidi1, HE Congyong2   

  1. 1. China Electronics Technology Group Corporation No. 24 Research Institute, Chongqing 400060, China; 2. China Electronics Technology Group Corporation Chip Technology (Group) Co., Ltd., Chongqing 400060, China
  • Received:2026-06-17 Revised:2026-09-03 Online:2026-09-07 Published:2026-09-07

摘要: 倒装芯片技术作为先进微电子封装的核心支撑技术,其发展贯穿了凸点制备工艺革新与系统级异构集成演进两大主线。系统梳理倒装芯片技术凸点的工艺迭代历程,阐明印刷、电镀、蒸发等凸点成型技术的技术原理及工艺流程,探讨倒装芯片的组装工艺与底部填充方式,深入分析倒装芯片技术在先进封装中的集成策略,并进一步展望倒装芯片技术在先进封装领域的未来发展趋势,为倒装芯片技术的工艺优化与产业应用提供理论参考与技术指引。

关键词: 倒装芯片, 先进封装, 系统级集成, 堆叠封装, 凸点制作

Abstract: Flip-chip technology, as a core supporting technology for advanced microelectronic packaging, runs through two main threads: the innovation of bump fabrication processes and the evolution of system-level heterogeneous integration. This paper systematically reviews the process iteration of flip-chip bump technology, clarifying the technical principles and fabrication process of bump forming technologies such as printing, electroplating and evaporation. It also discusses the assembly and underfill methods for flip-chip packaging, conducts an in-depth analysis of the integration strategies and prospects the future development trends of flip-chip in the field of advanced packaging. Thus, it provides theoretical reference and technical guidance for the process optimization and industrial application of flip-chip technology.

Key words: flip-chip, advanced packaging, system-level integration, stacked packaging, bump fabrication