关键词: 先进封装, 玻璃基板, 无碱铝硼硅玻璃, 理化性能

Abstract: With the expanding application of glass substrates in the advanced packaging field and the rapid development of through-glass via (TGV) technology, low-loss, high-strength, high-toughness, wide-expansion, large-sized, and high-quality glass substrates are gradually becoming core materials for the upgrade of the advanced packaging industry and the application of TGV technology. This study focuses on alkali-free aluminoborosilicate glass and investigates the effect of replacing RO (CaO+MgO) with B₂O₃ in the chemical composition on the glass structure and properties. The results show that as the B₂O₃/RO ratio increases, the glass dielectric constant, dielectric loss, coefficient of thermal expansion, and Vickers hardness decrease monotonically, while the elastic modulus increases monotonically. Chemical stability continuously deteriorates, and this change may be related to the enhanced phase separation tendency of the glass. The glass network is densest when the B₂O₃/RO ratio is 1, at which point the softening point, annealing point, transition point, and strain point reach their maximum values.

Key words: advanced packaging, glass substrate, alkali-free aluminoborosilicate glass, physical and chemical properties