中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2025, Vol. 25 ›› Issue (6): 060204 . doi: 10.16257/j.cnki.1681-1070.2025.0055

• 封装、组装与测试 • 上一篇    下一篇

先进电子封装用焊锡球关键尺寸检测的研究*

李赵龙1,王同举1,刘亚浩1,张文倩1,雷永平2   

  1. 1. 北华航天工业学院电子与控制工程学院,河北 廊坊? 065000;2. 北京工业大学材料与制造学部,北京 100124
  • 收稿日期:2024-12-06 出版日期:2025-06-27 发布日期:2025-01-20
  • 作者简介:李赵龙(2001—),男,河北石家庄人,硕士研究生,现从事半导体封装技术、材料及器件的可靠性研究工作。

Research on Critical Dimensional Inspection of Solder Balls for Advanced Electronic Packaging

LI Zhaolong1, WANG Tongju1, LIU Yahao1, ZHANG Wenqian1, LEI Yongping2   

  1. 1. School of Electronic and Control Engineering, North China Institute of AerospaceEngineering, Langfang 065000, China; 2. Faculty of Materialsand Manufacturing, BeijingUniversity of Technology, Beijing100124, China
  • Received:2024-12-06 Online:2025-06-27 Published:2025-01-20

摘要: 焊锡球圆度和粒径的精度决定着球栅阵列(BGA)封装、芯片级封装(CSP)等先进芯片封装产品的质量。在对焊锡球进行检测时,焊锡球会粘连在检测视野内,难以快速精确地批量测量其圆度和粒径。为实现对760 μm以下粘连焊锡球的精准检测,提出了一种基于凹点检测与椭圆拟合相结合的检测算法。该算法运用Harris角点检测算子检测图像中粘连焊锡球的凹点,结合凹点最短路径匹配准则实现焊锡球分离。通过Canny边缘检测算子检测焊锡球的边缘轮廓,基于轮廓点坐标拟合出椭圆曲线,从而实现焊锡球圆度与粒径的检测。检测结果表明,与扫描电镜测量结果相比,算法检测的焊锡球圆度误差可控制在3%以下,粒径相对误差可控制在1%以下。该技术为焊锡球的批量检测提供了一种快速有效的方法。

关键词: 先进封装, 焊锡球, 粘连图像分割, 尺寸测量

Abstract: The accuracy of the roundness and particle size of solder balls determines the quality of advanced chip packaging products such as ball grid array (BGA) package and chip scale package (CSP). When inspecting solder balls, the solder balls will stick in the inspection field of view, which makes it difficult to measure their roundness and particle size quickly and accurately in batches. In order to realize the accurate detection of adherent solder balls below 760 μm, an inspection algorithm based on the combination of concave point detection and ellipse fitting is proposed. The algorithm uses Harris corner detection operator to detect the concave points of the adherent solder balls in the image, and combines the shortest path matching criterion of the concave points to realize the separation of solder balls. The edge contour of the solder balls is detected by the Canny edge detection operator, and an elliptic curve is fitted based on the coordinates of the contour points, thus realizing the detection of the roundness and particle size of the solder balls. The test results show that the roundness error of solder balls detected by the algorithm can be controlled below 3% and the relative error of particle size can be controlled below 1% compared with the scanning electron microscope measurements. This technique provides a fast and effective method for batch inspection of solder balls.

Key words: advanced packaging, solder ball, adhesion image segmentation, dimensional measurement

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